DocumentCode
3581651
Title
Chua´s chaotic oscillator as the GaAs manufacturing process state indicator
Author
Kuxa, Evgeny ; Parker, Anthony E. ; Mahon, Simon J. ; Fattorini, Anthony P. ; Wang, Wen-Kai ; Kuo, Richard ; Heimlich, Michael C.
Author_Institution
Department of Engineering, Macquarie University, Sydney, NSW 2109, Australia
fYear
2014
Firstpage
1046
Lastpage
1048
Abstract
This paper presents the results of the measurements of a GaAs Chua´s circuit used for a new manufacturing process monitor. The proposed monitoring method is suggested to replace or complement the PCM which appears to be less predictive for more complex and nonlinear circuits. The chaotic signal generated by the circuit was recorded and the capacitor voltage equilibrium points were recovered from the time-series. It is shown that there exists a strong correlation between the equilibrium points´ separation and many of the PCM parameters, such as transistor threshold voltage and drain current. The correlation demonstrates that the Chua´s circuit is sensitive to the process variations which makes this circuit a vital candidate for the circuit control monitor (CCM).
Keywords
Correlation; Current measurement; Oscillators; Phase change materials; Semiconductor device measurement; Transistors; Voltage measurement; Chua´s circuit; chaotic oscillator; compound semiconductors; process control;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference (APMC), 2014 Asia-Pacific
Type
conf
Filename
7067660
Link To Document