• DocumentCode
    3581651
  • Title

    Chua´s chaotic oscillator as the GaAs manufacturing process state indicator

  • Author

    Kuxa, Evgeny ; Parker, Anthony E. ; Mahon, Simon J. ; Fattorini, Anthony P. ; Wang, Wen-Kai ; Kuo, Richard ; Heimlich, Michael C.

  • Author_Institution
    Department of Engineering, Macquarie University, Sydney, NSW 2109, Australia
  • fYear
    2014
  • Firstpage
    1046
  • Lastpage
    1048
  • Abstract
    This paper presents the results of the measurements of a GaAs Chua´s circuit used for a new manufacturing process monitor. The proposed monitoring method is suggested to replace or complement the PCM which appears to be less predictive for more complex and nonlinear circuits. The chaotic signal generated by the circuit was recorded and the capacitor voltage equilibrium points were recovered from the time-series. It is shown that there exists a strong correlation between the equilibrium points´ separation and many of the PCM parameters, such as transistor threshold voltage and drain current. The correlation demonstrates that the Chua´s circuit is sensitive to the process variations which makes this circuit a vital candidate for the circuit control monitor (CCM).
  • Keywords
    Correlation; Current measurement; Oscillators; Phase change materials; Semiconductor device measurement; Transistors; Voltage measurement; Chua´s circuit; chaotic oscillator; compound semiconductors; process control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference (APMC), 2014 Asia-Pacific
  • Type

    conf

  • Filename
    7067660