Applications of microwaves to technological plasmas

With contributions to the solution of the important general future problems as energy supply, environmental protection, material development, and progress in medicine during the last years the technology of microwave generated plasmas developed to a scientific discipline of high social relevance and of great economical importance. Based on the fundamental plasma parameters and their relation to the frequency of the applied electromagnetic waves the potential of the low-temperature plasmas is explained by their ability to effectively produce charged particles as electrons and ions, specific molecules and radicals in a specific non-equilibrium, to effectively use the boundary layers with their high electric fields near to the walls and to generate plasma torches at atmospheric pressure. Experimental results of applications of low-temperature microwave generated plasmas at low-pressure and under atmospheric conditions are presented and discussed.