• DocumentCode
    359100
  • Title

    Dynamics of contact-mode atomic force microscopes

  • Author

    El Rifai, Osamah M. ; Youcef-Toumi, Kamal

  • Author_Institution
    MIT, Cambridge, MA, USA
  • Volume
    3
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    2118
  • Abstract
    The rapid development of the atomic force microscope (AFM) has been motivated by a continuous unfolding of new applications and fundamental research areas utilizing AFM technology. As a result, there is a demand for better understanding of its dynamics and control to cope up with application requirements. This work presents a dynamic model for an AFM including its scanner, cantilever, probe-sample interaction force, and a simple sliding friction model. A description of possible sources of disturbances and noises are also given. Using a PI controller, simulations for constant-speed contact-mode scanning are presented. Simulation results were capable of reproducing experimental observations which are also presented. The results demonstrate the high sensitivity of AFM images to scan parameters and illustrate some potential artifacts that can result if parameters are not properly selected
  • Keywords
    atomic force microscopy; dynamics; sliding friction; two-term control; PI controller; atomic force microscope; cantilever; contact-mode; dynamics; scanner; sliding friction; Atomic force microscopy; Control systems; Displacement control; Force control; Force sensors; Friction; Optical sensors; Scanning probe microscopy; Sliding mode control; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    American Control Conference, 2000. Proceedings of the 2000
  • Conference_Location
    Chicago, IL
  • ISSN
    0743-1619
  • Print_ISBN
    0-7803-5519-9
  • Type

    conf

  • DOI
    10.1109/ACC.2000.879575
  • Filename
    879575