DocumentCode
359100
Title
Dynamics of contact-mode atomic force microscopes
Author
El Rifai, Osamah M. ; Youcef-Toumi, Kamal
Author_Institution
MIT, Cambridge, MA, USA
Volume
3
fYear
2000
fDate
2000
Firstpage
2118
Abstract
The rapid development of the atomic force microscope (AFM) has been motivated by a continuous unfolding of new applications and fundamental research areas utilizing AFM technology. As a result, there is a demand for better understanding of its dynamics and control to cope up with application requirements. This work presents a dynamic model for an AFM including its scanner, cantilever, probe-sample interaction force, and a simple sliding friction model. A description of possible sources of disturbances and noises are also given. Using a PI controller, simulations for constant-speed contact-mode scanning are presented. Simulation results were capable of reproducing experimental observations which are also presented. The results demonstrate the high sensitivity of AFM images to scan parameters and illustrate some potential artifacts that can result if parameters are not properly selected
Keywords
atomic force microscopy; dynamics; sliding friction; two-term control; PI controller; atomic force microscope; cantilever; contact-mode; dynamics; scanner; sliding friction; Atomic force microscopy; Control systems; Displacement control; Force control; Force sensors; Friction; Optical sensors; Scanning probe microscopy; Sliding mode control; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2000. Proceedings of the 2000
Conference_Location
Chicago, IL
ISSN
0743-1619
Print_ISBN
0-7803-5519-9
Type
conf
DOI
10.1109/ACC.2000.879575
Filename
879575
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