• DocumentCode
    3591915
  • Title

    A touch probe sensor using longitudinal vibration of PZT thin film transducer

  • Author

    Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru K. ; Higuchi, Toshiro

  • Author_Institution
    Dept. of Precision Machinery Eng., Tokyo Univ., Japan
  • Volume
    1
  • fYear
    1998
  • fDate
    6/20/1905 12:00:00 AM
  • Firstpage
    481
  • Abstract
    Touch probe sensors, rod-shaped and flat-type, have been fabricated. These sensors use the longitudinal vibration of PZT thin film transducer. The latter has been improved by miniaturization and using a flat configuration. The characteristics were evaluated by experiments
  • Keywords
    Q-factor; lead compounds; microsensors; piezoelectric thin films; piezoelectric transducers; scanning probe microscopy; surface topography measurement; PZT; PbZrO3TiO3; SPM; exponential horn; flat-type sensor; high precision CMM; longitudinal vibration; mechanical Q factor; miniaturization; resonance frequency; rod-shaped sensor; surface roughness measurement; thin film transducer; touch probe sensor; Probes; Resonance; Resonant frequency; Sensor phenomena and characterization; Tactile sensors; Thin film sensors; Transducers; Transistors; Vibrations; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4095-7
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1998.762193
  • Filename
    762193
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3591915