Title :
Electrical properties of plasma-treated FEP films
Author :
Takanashi, Teruo ; Ikezaki, Kazuo
Author_Institution :
Fac. of Sci. & Technol., Keio Univ., Yokohama, Japan
Abstract :
Ar plasma treatment effect on the electrical properties of tetrafluoroethylene and hexafluoropropylene copolymer (FEP) is examined at high temperatures. Conduction current in the treated FEP is much larger than that in the untreated FEP at high temperatures. We propose a model to explain the large conduction currents in the plasma treated FEP at high temperatures. In this model, charge carrier generation centers produced by the plasma treatment are thermally dissociated to positive mobile ions. These positive charges are responsible for the large conductivity in the plasma treated FEP at high temperatures. The activation energy for the dissociation is estimated to be 0.7 eV
Keywords :
insulating thin films; ionic conductivity; plasma materials processing; polymer blends; polymer films; positive ions; Ar; Ar plasma treatment; activation energy; charge carrier generation centers; conduction current; conductivity; electrical properties; high temperatures; plasma-treated FEP films; positive charges; positive mobile ions; tetrafluoroethylene and hexafluoropropylene copolymer; thermal dissociation; Argon; Gold; Plasma chemistry; Plasma measurements; Plasma properties; Plasma temperature; Polymers; Surface treatment; Thermal conductivity; Voltage;
Conference_Titel :
Industry Applications Conference, 2000. Conference Record of the 2000 IEEE
Conference_Location :
Rome
Print_ISBN :
0-7803-6401-5
DOI :
10.1109/IAS.2000.881177