Analysis of SOI cavity resonator by means of a fully automatic time-domain response prediction algorithm

A cavity resonating structure, obtained by means of SOI technology is analyzed. The cavity has been modelled using semi-analytical design rules and by combining numerical full-wave time-domain analysis with a fully automated signal prediction algorithm. This latter allows to reduce the simulation run time by adaptively building up a parametric model for the circuit impulse response. The technique relies on the Pencil Matrix (PM) metbod for the poles identification, while singular value decomposition (SVD) approach is used for estimating the correspondent model order. Up to one order of magnitude in the reduction of tbe simulation time may he achieved without loss of accuracy. The results for the resonator are provided and compared with measured data.