Title :
Prediction of the thermal sensitivity of surface acoustic waves excited under a periodic grating of electrodes
Author :
Pastureaud, Th ; Ballandras, S. ; Steichen, W.
Author_Institution :
Temex Microelectron., Sophia Antipolis, France
Abstract :
A theoretical analysis and a numerical tool have been developed to predict the thermal dispersion of general electroacoustic devices. The proposed model accounts for electrode contribution to the frequency vs. temperature law. The computed thermal sensitivities are compared to experimental results for different kinds of substrates and waves.
Keywords :
acoustoelectric devices; electrochemical electrodes; surface acoustic waves; temperature sensors; electroacoustic devices; electrode contribution; electrodes periodic grating; surface acoustic waves; thermal dispersion; thermal sensitivity; Acoustic waves; Acoustoelectric devices; Admittance; Electrodes; Frequency; Geometry; Gratings; Surface acoustic waves; Temperature sensors; Thermomechanical processes;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293388
