Title :
IEE Colloquium on Extremely Hard Materials for Micromechanics (Ref. No.1997/059)
fDate :
4/24/1997 12:00:00 AM
Abstract :
The following topics were dealt with: diamond-like carbon; CVD diamond; silicon nitride layers for micromechanical structures; silicon carbide layers; micromechanics; dry etching
Keywords :
hardness; CVD diamond; Si3N4 layers; SiC layers; diamond-like carbon; dry etching; extremely hard materials; micromechanical structures; micromechanics;
Conference_Titel :
Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on
