Research on the Cusp Electromagnetic Field in Single Crystal Furnace

In this paper, the cusp electromagnetic field is researched to improve the quality of single crystal. The cusp electromagnetic field in 8 inch single crystal furnace is modeled with ANSYS software, the electromagnetic field distribution, intensity and the factors that influence electromagnetic field intensity, such as current of the coil, distance between two coils and etc., of the cusp electromagnetic field are simulated and analyzed and optimized using finite element method. Finally, the optimum design of cusp electromagnetic field is validated, analyzing the key parameters of the electromagnetic field whether can meet the demands offered by the crystal growth or not.