Computational study of plasma-surface interactions during plasma oxidation process

The contribution presents results of the computer experiment describing the interaction of low-temperature multicomponent plasma with immersed metal substrates. For this purpose two models were prepared. The first model is designed to study the volume processes in oxygen-containing electronegative plasma. The used technique was the macroscopic kinetic approach with kinetic scheme consisting of more than one hundred reactions. As a result the concentrations of individual charged species for various discharge parameters were derived. These species are used as input parameters in the second model based on the PIC-MC particle simulation technique. With the help of this model the sheath structure of the multicomponent plasma containing more than one type of negative as well as positive ions and the fluxes of individual charged species impinging the oxidized substrates were studied.