Title :
Nanostructured Integrated Electron Source
Author :
Schoessler, C. ; Koops, H.W.P.
Author_Institution :
Deutsche Telekom AG Technologiezentrum, Germany
Keywords :
Brightness; Capacitance; Crystals; Electron beams; Electron sources; Joining processes; Lithography; Resistors; Transmission electron microscopy; Tungsten;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627695
