• DocumentCode
    3597366
  • Title

    Novel electrode configurations of bulk acoustic wave resonators for liquid sensing applications

  • Author

    Zhang, Chao ; Vetelino, John F.

  • Author_Institution
    Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA
  • Volume
    1
  • fYear
    2000
  • fDate
    10/1/2000 12:00:00 AM
  • Firstpage
    421
  • Abstract
    A variety of quartz thickness shear mode (TSM) resonant sensors with different electrode configurations have been designed, fabricated and tested in liquids for probing the electrical property changes. The resonance frequency of the sensors was found to have more than an order of magnitude increase in sensitivity over the standard AT cut quartz resonant sensor. The increase in sensitivity is due to the ability of the sensors to detect changes in the electrical properties in the liquid
  • Keywords
    acoustic resonators; bulk acoustic wave devices; chemical sensors; crystal resonators; electrodes; quartz; SiO2; bulk acoustic wave resonator; electrical properties; electrode configuration; liquid sensor; quartz thickness shear mode resonant sensor; resonance frequency; sensitivity; Acoustic waves; Chemical and biological sensors; Electrodes; Frequency measurement; Liquids; Mechanical factors; Mechanical sensors; Oscillators; Resonance; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2000 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-6365-5
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2000.922586
  • Filename
    922586
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3597366