Photonic integrated circuits using bandgap energy controlled selective MOVPE technique

Author

Komatsu, Keiro

Author_Institution

Opto-Electron. Res. Labs., NEC Corp., Tsukuba, Japan

Volume

4

fYear

1996

Firstpage

77

Abstract

The bandgap energy controlled selective MOVPE technique is a quite powerful fabrication tool for photonic integrated circuits (PICs), because in-plane bandgap energy control can be achieved by simply changing mask widths along a waveguide direction with no waveguide discontinuities. Here, various kinds of PIC, such as modulator integrated DFB lasers, transceiver PICs, optical switch matrices and arrayed semiconductor optical amplifiers, using this technique are reported.

Keywords

distributed feedback lasers; electro-optical modulation; electro-optical switches; energy gap; integrated optoelectronics; masks; optical communication equipment; optical fabrication; optical planar waveguides; optical receivers; optical transmitters; semiconductor growth; semiconductor lasers; transceivers; vapour phase epitaxial growth; arrayed semiconductor optical amplifiers; bandgap energy controlled selective MOVPE technique; fabrication tool; in-plane bandgap energy control; mask widths; modulator integrated DFB lasers; optical communications equipment fabrication; optical switch matrices; optical waveguides; photonic integrated circuits; transceiver PICs; waveguide direction; waveguide discontinuities;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Communication, 1996. ECOC '96. 22nd European Conference on

Print_ISBN

82-423-0418-1

Type

conf

Filename

715470