Title :
A cylindrical micro ultrasonic motor fabricated by improved hydrothermal method
Author :
Morita, Takeshi ; Kurosawa, Minoru ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Machinery Eng., Tokyo Univ., Japan
Abstract :
A PZT thin film application to a micro ultrasonic motor was improved by a single process hydrothermal method. The new process involves less distribution of chemical components and so contributes to higher efficiency of the stator transducer. The output torque of the micro ultrasonic motor was measured to be 7.0 μNm and the maximum revolution speed was 880 rpm at 15 Vp-p driving voltage. Furthermore, the relationship between KOH concentration and film performance indicated that there is ample room for further improvement in the hydrothermal method
Keywords :
crystal growth from solution; lead compounds; micromotors; piezoceramics; piezoelectric thin films; stators; torque; ultrasonic motors; 15 V; KOH; KOH concentration; PZT; PZT thin film; PbZrO3TiO3; chemical component distribution; cylindrical micro ultrasonic motor; driving voltage; film performance; hydrothermal method fabrication; maximum revolution speed; output torque; single process hydrothermal method; stator transducer efficiency; Chemical processes; Chemical transducers; Micromotors; Stators; Torque measurement; Transistors; Ultrasonic transducers; Ultrasonic variables measurement; Velocity measurement; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613578
