Title :
New dynamic scanning force microscopes using piezoelectric PZT microcantilevers
Author :
Itoh, Toshihiro ; Chu, Jiaru ; Misumi, Ichiko ; Kataoka, Kenichi ; Suga, Tadatomo
Author_Institution :
Res. Center for Adv. Sci. & Technol., Tokyo Univ., Japan
Abstract :
Piezoelectric cantilevers have made it possible to build new scanning force microscopes (SFMs) which are simple, compact and easy to operate, because they have self-sensing, self-exciting and self-deflection controlling abilities. Specifically, since they can directly be excited by applying ac voltage to the piezoelectric layer, new types of dynamic SFMs are expected to be developed using them. In this paper, we describe a new dynamic SFM in liquid and a new dynamic contact mode SFM using piezoelectric microcantilevers with sol-gel derived PZT thin film
Keywords :
atomic force microscopy; micromechanical devices; piezoelectric devices; piezoelectric thin films; semiconductor technology; sol-gel processing; 2-propanol; PZT microcantilevers; Si; dynamic SFM; dynamic contact mode SFM; dynamic scanning force microscopes; ion beam etching; liquid; piezoelectric layer; piezoelectric microcantilevers; resonance spectrum; self-deflection; self-exciting; self-sensing; sol-gel PZT thin film; Biology; Control systems; Electrodes; Force control; Oscillators; Piezoelectric films; Probes; Transmission electron microscopy; Voltage; Zinc oxide;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613685
