Title :
High Q silicon nitride photonic cavities
Author :
Gondarenko, Alexander ; Levy, Jacob ; Lipson, Michal
Author_Institution :
Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate high confinement, low loss silicon nitride ring resonators with intrinsic Q of 4,000,000 in the telecommunication C-band. We measure the scattering and absorption losses to be below .08 dB/cm and .02 dB/cm, respectively.
Keywords :
integrated optics; optical losses; optical resonators; optical waveguides; silicon compounds; SiN; absorption loss; photonic cavities; ring resonators; scattering loss; silicon nitride; telecommunication C-band; waveguide; Absorption; Atmosphere; Loss measurement; Optical losses; Optical ring resonators; Optical scattering; Optical waveguides; Propagation losses; Resonance; Silicon; (130.3130) Integrated optics devices; (130.3130) Integrated optics materials; (140.3945) Microcavities;
Conference_Titel :
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Print_ISBN :
978-1-55752-869-8
Electronic_ISBN :
978-1-55752-869-8