Title :
Comparative study for electrostatic MEMS converters
Author :
Salem, Marwa S. ; Zekry, A.A. ; Ragai, H.F.
Author_Institution :
ECE Dept, Ain Shams Univ., Cairo, Egypt
Abstract :
The main objective of this paper is to compare between the two well-known electrostatic MEMS converters, which are the gap closing and overlap converters in order to select the most suitable one for energy scavenging system. This comparison carried out from three points of view: Firstly, by referring to the cited work, secondly by performing qualitative analysis between the two converters, finally by performing analytical calculation and simulation using ANSYS.
Keywords :
convertors; energy harvesting; micromechanical devices; ANSYS; electrostatic MEMS converters; energy scavenging system; gap closing; overlap converters; qualitative analysis; Capacitance; Capacitors; Electrostatics; Fingers; Micromechanical devices; Performance analysis; Springs; Very large scale integration; Vibrations; Wireless sensor networks;
Conference_Titel :
Radio Science Conference, 2009. NRSC 2009. National
Print_ISBN :
978-1-4244-4214-0
