Title :
Influence of technological parameters on the dynamic behavior of a MEMS accelerometer
Author :
Comeaga, C.D. ; Ionascu, G. ; Manea, E. ; Sandu, A. ; Bogatu, L. ; Besnea, D.
Author_Institution :
Politeh. Univ. of Bucharest, Bucharest, Romania
Abstract :
The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
Keywords :
accelerometers; finite element analysis; micromachining; micromechanical devices; piezoresistive devices; vibration measurement; MEMS accelerometer; bulk-micromachined silicon piezoresistive accelerometer; finite element method; numerical simulation; resonant frequencies; vibration modes; Accelerometers; Finite element methods; Micromechanical devices; Piezoresistive devices; Sensitivity; Sensors; Silicon; FEM; MEMS accelerometer; bulk micromachining; resonant (natural) frequency; sensitivity;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650639
