DocumentCode
3599467
Title
Influence of technological parameters on the dynamic behavior of a MEMS accelerometer
Author
Comeaga, C.D. ; Ionascu, G. ; Manea, E. ; Sandu, A. ; Bogatu, L. ; Besnea, D.
Author_Institution
Politeh. Univ. of Bucharest, Bucharest, Romania
Volume
1
fYear
2010
Firstpage
243
Lastpage
246
Abstract
The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
Keywords
accelerometers; finite element analysis; micromachining; micromechanical devices; piezoresistive devices; vibration measurement; MEMS accelerometer; bulk-micromachined silicon piezoresistive accelerometer; finite element method; numerical simulation; resonant frequencies; vibration modes; Accelerometers; Finite element methods; Micromechanical devices; Piezoresistive devices; Sensitivity; Sensors; Silicon; FEM; MEMS accelerometer; bulk micromachining; resonant (natural) frequency; sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2010 International
ISSN
1545-827X
Print_ISBN
978-1-4244-5783-0
Type
conf
DOI
10.1109/SMICND.2010.5650639
Filename
5650639
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