Title :
Fluorinated polyimide waveguide fabricated using replication process with antisticking layer
Author :
Shioda, Tsuyoshi
Author_Institution :
Functional Materials Laboratory, Mitsui Chemicals, Inc., 580-32 Nagaura, Sodegaura, Chiba 299-0265, Japan; Tsuyoshi.Shioda@mitsui-chem.co.jp
Abstract :
A new replication process using a fluorinated polyimide was demonstrated. The waveguide using the replicated film exhibited low optical propagation losses of 0.3, 0.2 and 0.4 dB/cm at the wavelengths of 0.85, 1.31 and 1.55um, respectively.
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Print_ISBN :
87-90974-63-8
