DocumentCode

3599521

Title

A Rapid And Selective Anodic Bonding Method

Author

Ito, N. ; Yamada, K. ; Okada, H. ; Nishimura, M. ; Kuriyama, T.

Author_Institution

NEC Corporation

Volume

1

fYear

1995

Firstpage

277

Lastpage

280

Keywords

Accelerometers; Bonding; Cathodes; Electrodes; Fabrication; Glass; Microstructure; Sensor phenomena and characterization; Temperature sensors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717171

Filename

717171