Title :
A Rapid And Selective Anodic Bonding Method
Author :
Ito, N. ; Yamada, K. ; Okada, H. ; Nishimura, M. ; Kuriyama, T.
Author_Institution :
NEC Corporation
Keywords :
Accelerometers; Bonding; Cathodes; Electrodes; Fabrication; Glass; Microstructure; Sensor phenomena and characterization; Temperature sensors; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717171
