Title :
Langmuir Analysis On Hydrogen Gas Response Of Palladium-gate Fet
Author :
Morita, Yasuhiro ; Nakamura, Ken-ichi ; Kim, Chol
Author_Institution :
Tokyo Gas Co., Ltd.
Keywords :
Annealing; Atmosphere; Calibration; Electrodes; FETs; Gas detectors; Hydrogen; Palladium; Sensor phenomena and characterization; Threshold voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717336
