Title :
A layered SAW device based on ZnO/LiTaO3 for liquid media sensing applications
Author :
Powell, David A. ; Kalantar-zadeh, Kourosh ; Ippolito, Samuel ; Wlodarski, W.
Author_Institution :
Sch. of Electr. & Comput. Eng., R. Melbourne Inst. of Technol. Univ., Vic., Australia
Abstract :
Surface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36°-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO3 based SAW sensors, such as the -SiO2/LiTaO3 configuration. In this paper, the fabrication of the ZnO/LiTaO3 sensor is described and micro-characterisation of the deposited films is presented. Sensitivity of these devices to surface mass and dielectric perturbations is then presented, followed by an analysis of temperature stability.
Keywords :
lithium compounds; mass measurement; surface acoustic wave sensors; zinc compounds; LiTaO3; ZnO-LiTaO3; dielectric perturbations; layered SAW sensors; liquid media sensing applications; lithium tantalate substrate; mass sensitivity; surface mass perturbations; temperature stability; zinc oxide guiding layer; Acoustic sensors; Acoustic waves; Dielectric devices; Fabrication; Lithium compounds; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193449
