Title :
Ultra-precision air-pin sensor and its dynamic characteristic research
Author :
Hui, Zhang ; Shan, Cien ; Shanxi, Deng ; Huiqing, Wang
Author_Institution :
Dept. of Precision Instrum., Hefei Univ. of Technol., China
Abstract :
Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10 μm in the measurement range, and its measurement accuracy is better than 0.1μm, and its response time is less 10 ms.
Keywords :
nonelectric sensing devices; pneumatic systems; air-pin pneumatic-electronic sensor; dimension measurement; dynamic characteristics; machine part; noncontact technique; Aerodynamics; Atmosphere; Atmospheric measurements; Inductance measurement; Orifices; Power measurement; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Time measurement;
Conference_Titel :
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN :
0-7803-7631-5
DOI :
10.1109/SICE.2002.1195731
