• DocumentCode
    3600323
  • Title

    Elucidating the mechanism of nanocone and nanohole formation on Si by optical trap assisted nanopatterning

  • Author

    Ting-Hsuan Chen ; Yu-Cheng Tsai ; Fardel, Romain ; Arnold, Craig B.

  • Author_Institution
    Dept. of Mech. & Aerosp. Eng., Princeton Univ., Princeton, NJ, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Using optical trap-assisted nanopatterning (OTAN), we are able to control the formation of nanocones and nanoholes in Silicon. The effects are described by integrating FDTD and heat transfer modeling to account for the nanoscale features.
  • Keywords
    elemental semiconductors; finite difference time-domain analysis; nanofabrication; nanopatterning; nanophotonics; nanostructured materials; radiation pressure; semiconductor growth; silicon; FDTD modeling; Si; heat transfer modeling; nanocone formation; nanohole formation; nanoscale features; optical trap assisted nanopatterning; Charge carrier processes; Heat transfer; Nanopatterning; Optical films; Silicon; Surface morphology; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Type

    conf

  • Filename
    7182898
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3600323