A MEMS Implementation of a Classic Parametric Resonator

We present a microelectromechanical systems realization of a classic parametric resonator. This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be time modulated, is not affected by motion. We also present a simple, efficient, and intuitive model of parametric excitation. This model predicts the minimal modulation amplitude required to obtain an unbounded response in a parametric system with linear damping. We show experimental results in which the system is operated as a Meissner resonator.