Ka-Band Tunable Filter Using Metamaterials and RF MEMS Varactors

The design of a metamaterial-based tunable band elimination filter is described on silicon coplanar wave- guide (CPW) using complementary split ring resonators (CSRRs) and radio frequency microelectromechanical systems (MEMS) varactors to ensure compatibility with integrated circuit fabrication technology. CSRRs are patterned on both the active signal line and ground on both sides. A cantilever bridge is suspended on the signal line to realize variable capacitance. The rejection band of the filter is tuned by moving the MEMS bridge up or down using electrostatic actuation. A stopband around the center frequency of 35.32 GHz with a rejection ratio of ~ 20.19 dB is obtained when the bridge is pulled down. Another stopband around the center frequency 38.80 GHz is observed with a rejection ratio of ~ 18.29 dB when the bridge is allowed to remain in its up state without electrostatic actuation. Simulation for RF behavior is performed using ANSOFT High Frequency Structural Simulator v13. Numerical extraction of the filter parameters has been done using Agilent ADS (2009) and COVENTORWARE (2010) for mechanical and electromechanical characterization. This is the first reported tunable CPW filter having CSRR on the signal line and ground plane on silicon substrate using MEMS technology.