Title :
Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators
Author :
Cassella, Cristian ; Singh, Navab ; Bo Woon Soon ; Piazza, Gianluca
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper investigates the dependence of the quality factor (Q) of AlN contour mode resonators (CMRs) on the characteristics of the inactive regions located between the main resonator body (active region) and the stress-free surfaces placed beside the anchors. This paper shows that it is possible to reduce the energy leakage through the anchors by optimally sizing the width of such regions. To validate this concept, we built 16 different configurations of 225-MHz AlN CMRs, differing just by the size of the resonator inactive regions.
Keywords :
Q-factor; aluminium compounds; micromechanical resonators; AlN; contour-mode resonators; energy leakage; inactive regions; quality factor dependence; resonator body; stress-free surfaces; Acoustics; Aluminum nitride; Electrodes; Q-factor; Resonant frequency; Springs; AlN CMRs; acoustic transformer; acoustic transformer.; anchor losses; contour-mode; quality factor;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2015.2423663
