Thickness-Dependent Magnetic Properties of Patterned FeCoBSi Amorphous Thin Films on Silicon Substrate

Author

Zhang, L. ; Zhu, W.B. ; Zheng, H.Y. ; Wang, X. ; Bi, M. ; Wang, N. ; Zhou, P.H. ; Lu, H.P. ; Xie, J.L. ; Deng, L.J.

Author_Institution

Nat. Eng. Res. Center of Electromagn. Radiat. Control Mater., Chengdu, China

Volume

51

Issue

11

fYear

2015

Firstpage

1

Lastpage

4

Abstract

A FeCoBSi thin film with different thicknesses was deposited on Si (111) substrate by controlling the sputtering time under applied magnetic field and then patterned into strips with fixed width and length by conventional optical lithography. The magnetic properties of the films were investigated. Patterned FeCoBSi strips show an obvious tunable in-plane uniaxial magnetic aniostropy property in contrast with as-deposited FeCoBSi thin films. The values of effective magnetic aniostropy of the patterned films increase as the thickness increase. The tunable in-plane anisotropy field of FeCoBSi strips result in tunable high-frequency soft magnetic properties by altering the thickness of films. The ferromagnetic resonance frequency (f_r)showed a corresponding increment from 2 to 6.9 GHz. It indicated that the patterned FeCoBSi strips have great potential in high-frequency soft magnetic application fields.

Keywords

amorphous magnetic materials; boron alloys; cobalt alloys; ferromagnetic resonance; high-frequency effects; iron alloys; magnetic anisotropy; magnetic thin films; metallic thin films; photolithography; silicon alloys; soft magnetic materials; sputter deposition; Fe₆₆Co₁₇B₁₆Si; Si; Si (111) substrate; ferromagnetic resonance frequency; high-frequency soft magnetic properties; in-plane uniaxial magnetic aniostropy; magnetic held; patterned amorphous thin films; patterned strips; sputtering time; thickness-dependent magnetic properties; Amorphous magnetic materials; Anisotropic magnetoresistance; Magnetic anisotropy; Magnetic films; Resonant frequency; Strips; Magnetic properties; magnetic properties; patterned film; resonance frequency;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2015.2435033

Filename

7110396