Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches

We designed a one-mask process for all-molybdenum-based laterally actuated nanoelectromechanical switches. The damascene-like process is designed to ensure a smooth, high-aspect ratio, and metal-to-metal mechanical contact. Based on the statistical study of 800 devices, very high process yield can be achieved for fixed-fixed beam devices by selecting suitable device dimensions, i.e., the beam length versus beam width ratio should be <;70 and the ratio of actuation gap to contact gap should be >1.5. Typical failure modes are also discussed.