DocumentCode :
3603881
Title :
A Sub-400-nT/ \\sqrt {text {Hz}} , 775- \\mu text{W} , Multi-Loop MEMS Magnetometer With Integrated Readout E
Author :
Minotti, Paolo ; Brenna, Stefano ; Laghi, Giacomo ; Bonfanti, Andrea G. ; Langfelder, Giacomo ; Lacaita, Andrea L.
Author_Institution :
Dipt. di Elettron., Inf. e Bioingegneria, Politec. di Milano, Milan, Italy
Volume :
24
Issue :
6
fYear :
2015
Firstpage :
1938
Lastpage :
1950
Abstract :
This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amplifier front-end, and designed to be balanced with the sensor in terms of noise and power consumption. The overall system, including demodulation and filtering stages, shows a programmable full-scale up to ±2.4 mT, limited by the electronics saturation. The bandwidth can be programmed up to 150 Hz for off-resonance operation where a sub-400-nT/√Hz resolution at 775-μW power consumption is obtained, including the integrated readout and the Lorentz current. Perspectives on low-consumption driving oscillators for off-resonance mode are finally given.
Keywords :
differential amplifiers; low-power electronics; magnetometers; micromechanical devices; readout electronics; differential charge amplifier front-end; electronics saturation; five-fold sensitivity; integrated readout electronics; low-power readout integrated circuit; multi-loop MEMS magnetometer; power 775 muW; resolution improvement; z-axis Lorentz force magnetometer; Magnetic resonance; Magnetometers; Metals; Micromechanical devices; Perpendicular magnetic anisotropy; Sensitivity; Microelectromechanical systems (MEMS) sensors; capacitive sensing interface; magnetometers; navigation; navigation.;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2015.2452316
Filename :
7163502
Link To Document :
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