Title :
Erratum to “A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS” [DOI: 10.1109/JMEMS.2015.2432054]
Author :
Krijnen, Bram ; Swinkels, Koen R. ; Brouwer, Dannis M. ; Abelmann, Leon ; Herder, Just L.
Author_Institution :
, Demcon Advanced Mechatronics, Enschede, The Netherlands
Abstract :
In the above paper [1], references [32]–[38] were inadvertently removed and are as follows.
Keywords :
Actuators; Electrostatics; Kinematics; Position control;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2015.2452791
