Title :
CO2 Gas Sensors Based on Carbon Nanotube Thin Films Using a Simple Transfer Method on Flexible Substrate
Author :
Zheng-Dong Lin ; Sheng-Joue Young ; Shoou-Jinn Chang
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
This paper presents a flexible carbon nanotube (CNT)-based gas sensor on a low-cost polyimide substrate that responds immediately to CO2 at room temperature. Highly uniform CNT thin films, prepared by a reliable and reproducible transfer process, are used as resistive networks in gas detection. The flexible gas sensor exhibited a high sensitivity of 2.23% at room temperature when the concentration of ambient CO2 gas was 800 ppm. Both the speed and the stability of response of the fabricated sensor were favorable.
Keywords :
carbon nanotubes; flexible structures; gas sensors; nanosensors; polymer films; thin film sensors; CNT-based gas sensor; CO2; carbon nanotube thin film; flexible substrate; gas detection; polyimide substrate; reliable transfer process; reproducible transfer process; resistive network; simple transfer method; uniform CNT thin film; Carbon nanotubes; Gas detectors; Resistance; Sensitivity; Silicon; Substrates; Carbon nanotube; Gas sensor; flexible; gas sensor;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2015.2472968
