Title :
Stability improvement of amorphous InGaZnO TFTs by an asymmetric design
Author :
Chih-Chieh Hsu ; Chien-Hsun Wu ; Wei-Chieh Ting
Author_Institution :
Nat. Yunlin Univ. of Sci. & Technol., Douliu, Taiwan
Abstract :
In this reported work, amorphous InGaZnO thin film transistors (TFTs) with symmetric and asymmetric structures are fabricated. A constant positive gate bias for a time of 1-5 × 104 s was then applied to the TFTs to investigate their performance variation. The mobilities of the TFTs were not significantly degraded by a long stress time of 5 × 104 s. Also, decreases of sub-threshold swing and off-state current were observed for a stress time of 104 s. Although significant threshold voltage variation was found for the a-IGZO TFT with a symmetric design during the stress test, it could be reduced by 56% for the TFT fabricated by the proposed asymmetric design.
Keywords :
amorphous semiconductors; gallium compounds; indium compounds; semiconductor device testing; ternary semiconductors; thin film transistors; zinc compounds; InGaZnO; amorphous IGZO TFT; asymmetric design; constant positive gate bias; off-state current; stability improvement; stress test; subthreshold swing; thin film transistor; threshold voltage variation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2015.2036