• DocumentCode
    3606292
  • Title

    Stability improvement of amorphous InGaZnO TFTs by an asymmetric design

  • Author

    Chih-Chieh Hsu ; Chien-Hsun Wu ; Wei-Chieh Ting

  • Author_Institution
    Nat. Yunlin Univ. of Sci. & Technol., Douliu, Taiwan
  • Volume
    51
  • Issue
    19
  • fYear
    2015
  • Firstpage
    1534
  • Lastpage
    1536
  • Abstract
    In this reported work, amorphous InGaZnO thin film transistors (TFTs) with symmetric and asymmetric structures are fabricated. A constant positive gate bias for a time of 1-5 × 104 s was then applied to the TFTs to investigate their performance variation. The mobilities of the TFTs were not significantly degraded by a long stress time of 5 × 104 s. Also, decreases of sub-threshold swing and off-state current were observed for a stress time of 104 s. Although significant threshold voltage variation was found for the a-IGZO TFT with a symmetric design during the stress test, it could be reduced by 56% for the TFT fabricated by the proposed asymmetric design.
  • Keywords
    amorphous semiconductors; gallium compounds; indium compounds; semiconductor device testing; ternary semiconductors; thin film transistors; zinc compounds; InGaZnO; amorphous IGZO TFT; asymmetric design; constant positive gate bias; off-state current; stability improvement; stress test; subthreshold swing; thin film transistor; threshold voltage variation;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2015.2036
  • Filename
    7272265