Title :
Threshold Voltage Shift Effect of a-Si:H TFTs Under Bipolar Pulse Bias
Author :
Zhijin Hu ; Ling Wang, Lisa ; Congwei Liao ; Limei Zeng ; Chang-Yeh Lee ; Lien, Alan ; Shengdong Zhang
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
Threshold voltage shift (ΔVTH) effect of hydrogenated amorphous silicon thin-film transistors under bipolar pulse bias stress (BPBS) is investigated. The dependence of the ΔVTH effect on the signal pulsewidth, stress temperature, and negative pulse voltage magnitude of the BPBS is systematically measured, and explained by the charge trapping and detrapping theory. Results show that the BPBS leads to a noticeably suppressed ΔVTH, compared with the conventional unipolar pulse bias stress. It is suggested that the BPBS with proper negative pulse voltage magnitude and low pulse frequency is an effective way of suppressing ΔVTH, especially when the thin-film transistors work relatively at high temperature.
Keywords :
amorphous semiconductors; elemental semiconductors; hydrogenation; semiconductor device measurement; silicon; temperature measurement; thin film transistors; voltage measurement; BPBS; Si:H; TFT; bipolar pulse bias stress; charge trapping; detrapping theory; hydrogenated amorphous silicon thin-film transistors; negative pulse voltage magnitude; pulse frequency; signal pulsewidth; stress temperature; threshold voltage shift effect; unipolar pulse bias stress; Amorphous silicon; Electron traps; Insulators; Stress; Thin film transistors; Amorphous silicon; bipolar pulse bias stress (BPBS); thin-film transistor (TFT); threshold voltage shift ( $Delta V_{mathrm{ TH}}$ ); threshold voltage shift (ΔVTH); unipolar pulse bias stress (UPBS); unipolar pulse bias stress (UPBS).;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2015.2481434