DocumentCode
3608038
Title
Low-Frequency Noise Properties in Double-Gate Amorphous InGaZnO Thin-Film Transistors Fabricated by Back-Channel-Etch Method
Author
Chan-Yong Jeong ; Jong In Kim ; Jong-Ho Lee ; Jae-Gwang Um ; Jin Jang ; Hyuck-In Kwon
Author_Institution
Sch. of Electr. & Electron. Eng., Chung-Ang Univ., Seoul, South Korea
Volume
36
Issue
12
fYear
2015
Firstpage
1332
Lastpage
1335
Abstract
We investigated the low-frequency noise (LFN) properties of double-gate (DG) amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors (TFTs). The LFN from all of the DG, top-gate (TG), and bottom-gate (BG) operation modes was well explained in the framework of the correlated carrier number-mobility fluctuation. However, the extracted noise parameters of the border trap density (NT), Coulomb scattering coefficient (αS), and apparent noise parameter (αapp) exhibited the highest values during the TG operation mode and the lowest values during the DG operation mode. The higher noise parameters (NT, αS, and αapp) from the TG operation mode compared with those from the BG operation mode were attributed to the poorer quality of the TG interface than the BG interface in the fabricated back-channel-etch-type DG a-IGZO TFTs. During the DG sweeping operation, the formation of the bulk accumulation channel was observed. The lowest noise parameters (NT, αS, and αapp) from the DG operation mode were considered to be a result of the current conduction through the bulk accumulation channel with a relatively low oxygen vacancy-related trap concentration.
Keywords
amorphous semiconductors; etching; indium compounds; semiconductor device noise; thin film transistors; Coulomb scattering coefficient; InGaZnO; apparent noise parameter; back-channel-etch method; back-channel-etch-type DG a-IGZO TFT; border trap density; bulk accumulation channel; current conduction; double-gate amorphous thin-film transistors; extracted noise parameters; low oxygen vacancy-related trap concentration; low-frequency noise properties; Indium gallium zinc oxide; Logic gates; Low-frequency noise; Semiconductor device measurement; Thin film transistors; Double-gate a-IGZO TFTs; bulk accumulation channel; low-frequency noise; oxygen-vacancy related trap;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2015.2489223
Filename
7295557
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