Title :
Special Section on the 2014 SEMI Advanced Semiconductor Manufacturing Conference
Author :
Patterson, Oliver D. ; Werbaneth, Paul ; Braggin, Jennifer ; Radloff, Stefan
Abstract :
The big picture for the semiconductor industry shows slowing but still positive sales growth, a push back of the transition to 450 mm wafers to perhaps the next decade, and potential commercial implementation of EUV for some layers of some sub-10 nm nodes by 2019–2020.1–3 Per Gartner, current revenue growth is driven by smartphones, solid-state drives, and DRAM.1 A new semiconductor sector, wearables (smartwatches, smart glasses, Bluetooth headsets, etc.) is also driving some revenue growth but on a smaller scale. Critical to this revenue growth is the ability to deliver ever more powerful semiconductor technologies at a competitive cost.
Keywords :
Manufacturing automation; Meetings; Metrology; Process control; Semiconductor device manufacture; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2015.2488061