DocumentCode :
3610680
Title :
A Novel Humidity Sensor Based on the Extension of Thompson and Lampard Theorem
Author :
Islam, Tarikul ; Zargar, Zubair Hassan ; Rehman, Mahfoozur
Author_Institution :
Dept. of Electr. Eng., Jamia Millia Islamia Univ., Delhi, India
Volume :
62
Issue :
12
fYear :
2015
Firstpage :
4237
Lastpage :
4241
Abstract :
This paper deals with the development of an accurate and precise humidity sensor, which is based on the extension of Thompson and Lampard theorem and a sol-gel-based thermally and chemically stable metal oxide thin film. In light of the extension of the theorem, most appropriate conductors are shaped around the material and the resulting sensor has cross conductance, which is the function of thickness only. It is fabricated and tested for different ranges of humidity. It is found that the fabricated sensor has outstanding static and dynamic characteristics.
Keywords :
alumina; electrical conductivity; humidity sensors; thin films; Al2O3; Thompson and Lampard theorem; chemically stable metal oxide thin film; cross conductance; dynamic characteristics; humidity sensor; sol-gel-based thermally stable metal oxide thin film; static characteristics; thickness function; Accuracy; Humidity; Moisture measurement; Thin film sensors; Thin films; Alumina thin film; Thomson and Lampard theorem; cross conductance; electrical characteristics; humidity sensor;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2015.2492779
Filename :
7331114
Link To Document :
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