• DocumentCode
    3610680
  • Title

    A Novel Humidity Sensor Based on the Extension of Thompson and Lampard Theorem

  • Author

    Islam, Tarikul ; Zargar, Zubair Hassan ; Rehman, Mahfoozur

  • Author_Institution
    Dept. of Electr. Eng., Jamia Millia Islamia Univ., Delhi, India
  • Volume
    62
  • Issue
    12
  • fYear
    2015
  • Firstpage
    4237
  • Lastpage
    4241
  • Abstract
    This paper deals with the development of an accurate and precise humidity sensor, which is based on the extension of Thompson and Lampard theorem and a sol-gel-based thermally and chemically stable metal oxide thin film. In light of the extension of the theorem, most appropriate conductors are shaped around the material and the resulting sensor has cross conductance, which is the function of thickness only. It is fabricated and tested for different ranges of humidity. It is found that the fabricated sensor has outstanding static and dynamic characteristics.
  • Keywords
    alumina; electrical conductivity; humidity sensors; thin films; Al2O3; Thompson and Lampard theorem; chemically stable metal oxide thin film; cross conductance; dynamic characteristics; humidity sensor; sol-gel-based thermally stable metal oxide thin film; static characteristics; thickness function; Accuracy; Humidity; Moisture measurement; Thin film sensors; Thin films; Alumina thin film; Thomson and Lampard theorem; cross conductance; electrical characteristics; humidity sensor;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2015.2492779
  • Filename
    7331114