DocumentCode
3610680
Title
A Novel Humidity Sensor Based on the Extension of Thompson and Lampard Theorem
Author
Islam, Tarikul ; Zargar, Zubair Hassan ; Rehman, Mahfoozur
Author_Institution
Dept. of Electr. Eng., Jamia Millia Islamia Univ., Delhi, India
Volume
62
Issue
12
fYear
2015
Firstpage
4237
Lastpage
4241
Abstract
This paper deals with the development of an accurate and precise humidity sensor, which is based on the extension of Thompson and Lampard theorem and a sol-gel-based thermally and chemically stable metal oxide thin film. In light of the extension of the theorem, most appropriate conductors are shaped around the material and the resulting sensor has cross conductance, which is the function of thickness only. It is fabricated and tested for different ranges of humidity. It is found that the fabricated sensor has outstanding static and dynamic characteristics.
Keywords
alumina; electrical conductivity; humidity sensors; thin films; Al2O3; Thompson and Lampard theorem; chemically stable metal oxide thin film; cross conductance; dynamic characteristics; humidity sensor; sol-gel-based thermally stable metal oxide thin film; static characteristics; thickness function; Accuracy; Humidity; Moisture measurement; Thin film sensors; Thin films; Alumina thin film; Thomson and Lampard theorem; cross conductance; electrical characteristics; humidity sensor;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2015.2492779
Filename
7331114
Link To Document