Title :
Electrical design of through silicon via (lee, m., et al; 2014) [book review]
Author :
Orlandi, Antonio
Abstract :
This is a very interesting and well written book on a hot topic nowadays in signal and power integrity: the study of three dimensional integrated circuits (3D IC) with particular emphasis on the analysis and design of Through Silicon Vias (TSV). TSV, in very basic terms, is a metal pillar inside the silicon (Si) wafer with a silicon oxide coating (???liner???) to block the DC leakage current between the metal pillar and the silicon wafer.
Keywords :
Book reviews; Coatings; Integrated circuits; Silicon; Three-dimensional displays; Through-silicon vias;
Journal_Title :
Electromagnetic Compatibility Magazine, IEEE
DOI :
10.1109/MEMC.2015.7336692