Temperature characteristics of single-crystal silicon electret microphones

Author

Yasuno, Yoshinobu ; Itoh, Taira ; Yamada, Ayako ; Nojima, Yasuo ; Kidokoro, Kenichi ; Tajima, Toshifumi ; Iguchi, Yoshinori

Author_Institution

Kobayasi Inst. of Phys. Res., Kokubunji, Japan

Volume

22

Issue

6

fYear

2015

fDate

12/1/2015 12:00:00 AM

Firstpage

3658

Lastpage

3662

Abstract

Silicon Electret Condenser Microphones (Si-ECMs) are being studied to achieve small size, high performance, and reliability using Micro Electro Mechanical System (MEMS) technology. Increased robustness and stability are important to ensure wider use. In particular, temperature characteristics for microphones must be evaluated. Here, we focus on the diaphragm and impedance converter, which are the main factors determining the temperature characteristics of microphones, and present a method for measuring temperature characteristics and evaluating results for each parameter. The experimental Si-ECMs were found to have good temperature characteristics compared to a conventional ECM. These results indicate that the Si-ECM has the potential to be applied for measurement.

Keywords

diaphragms; electrets; elemental semiconductors; impedance convertors; microphones; microsensors; silicon; Si; diaphragm; impedance converter; microelectromechanical system; single crystal silicon electret microphones; temperature characteristics; Electrets; Frequency measurement; Microphones; Silicon; Temperature; Temperature measurement; Temperature sensors; Electrets; electrostatic devices; micro lectromechanical device; microphones;

fLanguage

English

Journal_Title

Dielectrics and Electrical Insulation, IEEE Transactions on

Publisher

ieee

ISSN

1070-9878

Type

jour

DOI

10.1109/TDEI.2015.004919

Filename

7367567