Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Summary form only given. Equivalent circuit of the on-top magnetic film-type radio-frequency (RF) integrated spiral inductor has been derived to analyze the real contribution of the permeability of the magnetic film to the inductance, L, and the quality factor, Q, of the inductor. The separation of parasitic impedances was the most critical issue. The equivalent circuit will also be required in the near future to design applied RF circuits. In this work, the micro-fabrication, RF measurements and the equivalent circuit analysis have been performed for two-port inductors made in-between a co-planar transmission line. The two port structure is very common in a real RF circuitry.