DocumentCode
3613510
Title
Modeling, scheduling, and prediction for wafer fabrication: queueing colored Petri-net and GA based approach
Author
An-Chih Huang; Li-Chen Fu; Ming-Hung Lin; Shun-Yu Lin
Author_Institution
Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Volume
3
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
3187
Abstract
We propose a modeling tool named QCPN (queueing colored Petri net). The main idea of this tool is to combine the original CTPN (colored timed Petri net) with the queueing systems. With the QCPN model, we can predict the delivery date of any specific product under some scheduling policies efficiently and rather precisely. In the scheduling phase, we use the GA based approach to search for the optimal combination of a number of heuristic rules. This QCPN based GA scheduler can greatly reduce the computation time so as to meet the need for a rapidly changing environment.
Keywords
"Semiconductor device modeling","Predictive models","Fabrication","Job shop scheduling","Processor scheduling","Integrated circuit modeling","Manufacturing processes","Power system modeling","Manufacturing systems","Semiconductor device manufacture"
Publisher
ieee
Conference_Titel
Robotics and Automation, 2002. Proceedings. ICRA ´02. IEEE International Conference on
Print_ISBN
0-7803-7272-7
Type
conf
DOI
10.1109/ROBOT.2002.1013717
Filename
1013717
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