• DocumentCode
    3613510
  • Title

    Modeling, scheduling, and prediction for wafer fabrication: queueing colored Petri-net and GA based approach

  • Author

    An-Chih Huang; Li-Chen Fu; Ming-Hung Lin; Shun-Yu Lin

  • Author_Institution
    Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • Volume
    3
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    3187
  • Abstract
    We propose a modeling tool named QCPN (queueing colored Petri net). The main idea of this tool is to combine the original CTPN (colored timed Petri net) with the queueing systems. With the QCPN model, we can predict the delivery date of any specific product under some scheduling policies efficiently and rather precisely. In the scheduling phase, we use the GA based approach to search for the optimal combination of a number of heuristic rules. This QCPN based GA scheduler can greatly reduce the computation time so as to meet the need for a rapidly changing environment.
  • Keywords
    "Semiconductor device modeling","Predictive models","Fabrication","Job shop scheduling","Processor scheduling","Integrated circuit modeling","Manufacturing processes","Power system modeling","Manufacturing systems","Semiconductor device manufacture"
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Automation, 2002. Proceedings. ICRA ´02. IEEE International Conference on
  • Print_ISBN
    0-7803-7272-7
  • Type

    conf

  • DOI
    10.1109/ROBOT.2002.1013717
  • Filename
    1013717