• DocumentCode
    3614147
  • Title

    Manufacturing of pixel detectors at Tesla SEZAM

  • Author

    M. Frys;S. Kapsia;Z. Spetik;T. Sezam;R.P. Radhostem;V. Jurka;V. Vrba

  • Author_Institution
    Inst. of Phys., Acad. of Sci. of the Czech Republic, Prague, Czech Republic
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    363
  • Lastpage
    367
  • Abstract
    Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented.
  • Keywords
    "Manufacturing","Detectors","Sensor phenomena and characterization","Large Hadron Collider","Production","Sensor arrays","Silicon","Strips","Testing","Tiles"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
  • Print_ISBN
    0-7803-7276-X
  • Type

    conf

  • DOI
    10.1109/ASDAM.2002.1088543
  • Filename
    1088543
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3614147