Title :
Manufacturing of pixel detectors at Tesla SEZAM
Author :
M. Frys;S. Kapsia;Z. Spetik;T. Sezam;R.P. Radhostem;V. Jurka;V. Vrba
Author_Institution :
Inst. of Phys., Acad. of Sci. of the Czech Republic, Prague, Czech Republic
fDate :
6/24/1905 12:00:00 AM
Abstract :
Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented.
Keywords :
"Manufacturing","Detectors","Sensor phenomena and characterization","Large Hadron Collider","Production","Sensor arrays","Silicon","Strips","Testing","Tiles"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
Print_ISBN :
0-7803-7276-X
DOI :
10.1109/ASDAM.2002.1088543
