Title :
AC response measurements of semiconductor gas sensors for temperature shift stimulation
Author :
K. Nitsch;T. Sobanski;K. Wisniewski;B. Licznerski
Author_Institution :
Fac. of Microsystem Electron. & Photonics, Wroclaw Univ. of Technol., Poland
fDate :
6/25/1905 12:00:00 AM
Abstract :
More advanced application based on semiconductor gas sensors required more sophisticated measuring methods. To achieve better accuracy level often AC methods were implemented into measuring systems. In this work attention was paid on measuring method consist in characterize impedance response of gas sensitive layer as a function of work temperature shift. Working temperature was changed between 20/spl deg/C to 750/spl deg/C. Automation measuring system for characterizing gas sensitive layer properties was described. Also the result of impedance and admittance measurements as a function of frequency and working temperature for commercial and in-house developed sensors was presented.
Keywords :
"Gas detectors","Temperature sensors","Impedance measurement","Thermal sensors","Thick films","Chemical sensors","Temperature control","Electrical resistance measurement","Pulse measurements","Photonics"
Conference_Titel :
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN :
0-7803-8002-9
DOI :
10.1109/ISSE.2003.1260558
