AC response measurements of semiconductor gas sensors for temperature shift stimulation

More advanced application based on semiconductor gas sensors required more sophisticated measuring methods. To achieve better accuracy level often AC methods were implemented into measuring systems. In this work attention was paid on measuring method consist in characterize impedance response of gas sensitive layer as a function of work temperature shift. Working temperature was changed between 20/spl deg/C to 750/spl deg/C. Automation measuring system for characterizing gas sensitive layer properties was described. Also the result of impedance and admittance measurements as a function of frequency and working temperature for commercial and in-house developed sensors was presented.