DocumentCode
3616371
Title
Automatic profiling of a steady state temperature field in thermochemical systems and devices
Author
P. Ostrowski;W. Lobodzinski;A. Skorek
Author_Institution
Fac. of Electr. Eng., Warsaw Tech. Univ., Poland
Volume
4
fYear
2004
fDate
6/26/1905 12:00:00 AM
Firstpage
2272
Abstract
This work presents a method of the steady state temperature profiling in the case of industrial thermochemical systems. A problem of this type represents an important element of the production processes in different industrial area such as: material engineering, manufacturing of semiconductor devices and VLSI systems, the monocrystals growth etc. The proposed method Is oriented towards the automation of the profiling process allowing to significantly reducing the duration of this operation. The papers covers theoretical basis of the method as well as examples of industrial applications.
Keywords
"Steady-state","Temperature","Manufacturing industries","Production systems","Semiconductor materials","Manufacturing processes","Semiconductor device manufacture","Semiconductor devices","Very large scale integration","Manufacturing automation"
Publisher
ieee
Conference_Titel
Industry Applications Conference, 2004. 39th IAS Annual Meeting. Conference Record of the 2004 IEEE
ISSN
0197-2618
Print_ISBN
0-7803-8486-5
Type
conf
DOI
10.1109/IAS.2004.1348792
Filename
1348792
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