• DocumentCode
    3616371
  • Title

    Automatic profiling of a steady state temperature field in thermochemical systems and devices

  • Author

    P. Ostrowski;W. Lobodzinski;A. Skorek

  • Author_Institution
    Fac. of Electr. Eng., Warsaw Tech. Univ., Poland
  • Volume
    4
  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    2272
  • Abstract
    This work presents a method of the steady state temperature profiling in the case of industrial thermochemical systems. A problem of this type represents an important element of the production processes in different industrial area such as: material engineering, manufacturing of semiconductor devices and VLSI systems, the monocrystals growth etc. The proposed method Is oriented towards the automation of the profiling process allowing to significantly reducing the duration of this operation. The papers covers theoretical basis of the method as well as examples of industrial applications.
  • Keywords
    "Steady-state","Temperature","Manufacturing industries","Production systems","Semiconductor materials","Manufacturing processes","Semiconductor device manufacture","Semiconductor devices","Very large scale integration","Manufacturing automation"
  • Publisher
    ieee
  • Conference_Titel
    Industry Applications Conference, 2004. 39th IAS Annual Meeting. Conference Record of the 2004 IEEE
  • ISSN
    0197-2618
  • Print_ISBN
    0-7803-8486-5
  • Type

    conf

  • DOI
    10.1109/IAS.2004.1348792
  • Filename
    1348792