An organic semiconductor based process for photodetecting applications

A low temperature (< 90/spl deg/C) fully lithographic transistor process flow is used to create a pentacene field effect transistor backplane and photodetectors using a soluble organic photoconductor, titanyl pthalalocyanine. Two encapsulation steps are used to protect the semiconductor and isolate elements to reduce leakage currents. The resulting photosensitive elements are tested, and shadows falling on a 4/spl times/3 diode connected active matrix array on a glass substrate are detected.