Title :
High-K dielectrics: materials physics, instabilities, defects, and reliability
fDate :
6/26/1905 12:00:00 AM
Keywords :
"High-K gate dielectrics","High K dielectric materials","Physics","Materials reliability","Atomic layer deposition"
Conference_Titel :
Integrated Reliability Workshop Final Report, 2004 IEEE International
Print_ISBN :
0-7803-8517-9
DOI :
10.1109/IRWS.2004.1422778
