• DocumentCode
    3618394
  • Title

    A-Si:H thin film transistors - reliability from materials to processes to devices

  • Author

    Yue Kuo

  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    197
  • Lastpage
    197
  • Keywords
    "Thin film transistors","Materials reliability","Crystalline materials","Microelectronics","Dielectrics","Liquid crystal displays","Consumer electronics","Optoelectronic and photonic sensors","Optical device fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2004 IEEE International
  • Print_ISBN
    0-7803-8517-9
  • Type

    conf

  • DOI
    10.1109/IRWS.2004.1422780
  • Filename
    1422780