DocumentCode
3618394
Title
A-Si:H thin film transistors - reliability from materials to processes to devices
Author
Yue Kuo
fYear
2004
fDate
6/26/1905 12:00:00 AM
Firstpage
197
Lastpage
197
Keywords
"Thin film transistors","Materials reliability","Crystalline materials","Microelectronics","Dielectrics","Liquid crystal displays","Consumer electronics","Optoelectronic and photonic sensors","Optical device fabrication"
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 2004 IEEE International
Print_ISBN
0-7803-8517-9
Type
conf
DOI
10.1109/IRWS.2004.1422780
Filename
1422780
Link To Document