مرکز منطقه ای اطلاع رساني علوم و فناوري - Real structure of sputtered yttrium oxide films with different oxygen content

DocumentCode :

3618854

Title :

Real structure of sputtered yttrium oxide films with different oxygen content

Author :

P. Sutta;I. Novotny;L. Harmatha

fYear :

2004

fDate :

6/26/1905 12:00:00 AM

Firstpage :

Lastpage :

Keywords :

"Oxygen","Sputtering","Dielectric thin films","Substrates","X-ray scattering","Crystallization","Lattices","Optical films","Residual stresses"

Publisher :

ieee

Conference_Titel :

Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on

Print_ISBN :

0-7803-8335-7

Type :

conf

DOI :

10.1109/ASDAM.2004.1441158

Filename :

1441158

Link To Document :