• DocumentCode
    3618860
  • Title

    AlGaM MSM characterisation by the light beam induced current technique

  • Author

    B. Paszkiewicz;A. Szyszka;R. Paszkiewicz;M. Wosko;M. Tlaczala

  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    275
  • Lastpage
    278
  • Keywords
    "Gallium nitride","Scanning electron microscopy","Spatial resolution","Testing","Substrates","Schottky barriers","Circuits","Optical polarization","Metallization","Photonics"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
  • Print_ISBN
    0-7803-8335-7
  • Type

    conf

  • DOI
    10.1109/ASDAM.2004.1441214
  • Filename
    1441214
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3618860