3618860

AlGaM MSM characterisation by the light beam induced current technique

B. Paszkiewicz;A. Szyszka;R. Paszkiewicz;M. Wosko;M. Tlaczala

2004

6/26/1905 12:00:00 AM

275

278

"Gallium nitride","Scanning electron microscopy","Spatial resolution","Testing","Substrates","Schottky barriers","Circuits","Optical polarization","Metallization","Photonics"

ieee

Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on

0-7803-8335-7

conf

10.1109/ASDAM.2004.1441214

1441214