Comparison of an L-array and a single transistor method to extract Leff and Rs in deep submicron MOSFETs

Author

S. Biesemans;K. De Meyer

Author_Institution

IMEC, Leuven, Belgium

fYear

1997

fDate

6/19/1905 12:00:00 AM

Firstpage

660

Lastpage

663

Keywords

"MOSFETs","Electrical resistance measurement","Uncertainty"

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

DOI

10.1109/ESSDERC.1997.194515

Filename

1503445

Link To Document