Title :
Comparison of an L-array and a single transistor method to extract Leff and Rs in deep submicron MOSFETs
Author :
S. Biesemans;K. De Meyer
Author_Institution :
IMEC, Leuven, Belgium
fDate :
6/19/1905 12:00:00 AM
Keywords :
"MOSFETs","Electrical resistance measurement","Uncertainty"
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194515
